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1

Nano-Structured TiN Thin Films Deposited by Single Ion Beam Reactive Sputtering

Bogdanov, Ž., Popović, N., Zlatanović, M., Goncić, B., Rakočević, Z., Zec, S.

Journal:

Materials Science Forum

Year:

2007

Language:

english

File:

PDF, 353 KB

english, 2007

2

Magnetron ion source for antimony ions

Todor Jokić, Georgije Josimov, Momčilo M. Tošić, Bratislav Goncić, Zvonimir Jurela

Journal:

Nuclear Instruments and Methods

Year:

1980

Language:

english

File:

PDF, 108 KB

english, 1980

3

Annealing behaviour of ion implanted crystalline copper

T Jokić, B Goncić, T Nenadović

Journal:

Year:

1990

Language:

english

File:

PDF, 101 KB

english, 1990

4

A method for ion etching depth control

B Goncić, T Jokić, N Popović, Ž Bogdanov

Journal:

Year:

1992

Language:

english

File:

PDF, 819 KB

english, 1992

5

Ion sputtering targets electrolytically prepared

Todor Jokić, Bratislav Goncić

Journal:

Applied Surface Science

Year:

1986

Language:

english

File:

PDF, 180 KB

english, 1986

6

Reactively sputtered ZrNx barrier films between Au and SiO2: surface and interface analysis

N. Popović, M. Milić, T. Nenadović, Ž. Bogdanov, B. Goncić, M. Zlatanović

Journal:

Applied Surface Science

Year:

1993

Language:

english

File:

PDF, 605 KB

english, 1993

7

Reactively sputtered Ni, Ni(N) and Ni3N films: Structural, electrical and magnetic properties

N. Popović, Ž. Bogdanov, B. Goncić, S. Štrbac, Z. Rakočević

Journal:

Applied Surface Science

Year:

2009

Language:

english

File:

PDF, 745 KB

english, 2009

8

TiN thin films deposited by ion beam sputtering: effects of energetic particles bombardment

N Popović, Ž Bogdanov, B Goncić, S Zec, Z Rakočević, M Zlatanović, D Peruško

Journal:

Thin Solid Films

Year:

2004

Language:

english

File:

PDF, 551 KB

english, 2004

9

Microstructural modification of TiN deposited by magnetron ion plating: Influence of magnetic field configuration

Miodrag Zlatanović, Nada Popović, Žarko Bogdanov, Radomir Beloševac, Amir Kunosić, Bratislav Goncić

Journal:

Thin Solid Films

Year:

1998

Language:

english

File:

PDF, 314 KB

english, 1998

10

Nickel film orientation change by nitrogen ion bombardment during deposition

N Popović, T Dimitrijević, Ž Bogdanov, B Goncić, S Štrbac, Z Rakočević

Journal:

Year:

1997

Language:

english

File:

PDF, 430 KB

english, 1997

11

The influence of the copper structure on gas desorption

Todor Jokić, Bratislav Goncić, Tomislav Nenadović

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

1987

Language:

english

File:

PDF, 151 KB

english, 1987

12

The influence of ion bombardment intensity during deposition on nickel films microstructure

N. Popović, Z. Bogdanov, B. Goncić, S. Zec, Z. Rakočević

Journal:

Thin Solid Films

Year:

1999

Language:

english

File:

PDF, 467 KB

english, 1999

13

Low-Energy Broad-Beam Sputter Deposition of TiNx Thin Films

Goncić, B., Popović, N., Bogdanov, Ž., Zec, S., Zlatanović, M.

Journal:

Materials Science Forum

Year:

2002

Language:

english

File:

PDF, 465 KB

english, 2002

14

Design of an apparatus for low-energy ion scattering from solid surfaces

I. Terzic, B. Goncic, D. Ciric, J. Vukanic

Year:

1977

Language:

english

File:

PDF, 439 KB

english, 1977

15

[IEEE International Conference on Microelectronics - Nis, Serbia (12-14 Sept. 1995)] Proceedings of International Conference on Microelectronics - ZrN as barrier film between Au and SiO/sub 2/: microstructural stability of the system

Popovic, N., Bogdanov, Z., Goncic, B., Zlatanovic, M.

Year:

1995

Language:

english

File:

PDF, 682 KB

english, 1995